Description
MKS FI80131 Remote Plasma Source AMAT 0920-00131 Tested 3514 Hours
SMC INR-499-201 Thermo Chiller Heat Exchanger INR-499-201-X021 tested
MKS FI80131 Remote Plasma Source ASTRONex AMAT 0920-00131 Rev C
Brooks Automation 6-0001-0136-SP Linear Track LTRA048-SBI
Edwards A532-40-905 Dry Vacuum Pump and Blower A301-86-905 IQDP40 QMB250 rebuild
ALPHASEM SL9021 Test Station ATS2 Blazer Intergrates Memory System
Yaskawa VS2B Robot & Controller RC/ELC1 DDMQF-SR22321R set
MKS ASTRONex Remote Plasma Source FI80131 Rev.B 0920-00057