LAM Research 4420 853-024403-006 Orbital Gas Panel Assembly
Genmark Automation RPO050339 300mm Robot Wafer Prealigner
Novellus P100 Controller Module 02-034310-00 Rev. E Novellus Concept Two Altus
Daihen EMAX Tunebox RF Match FLB-60M-03 0190-19674
AMAT 1 Heat Exchanger 0240-02163 Untested 1303232103 SN515303008057
AMAT 0 Heat Exchanger 0010-00918 Untested 118100030 SN51420300
AMAT Top Local Match 300mm 0010-08322
Genmark Automation Robot Controller S08R v.11
Genmark 400800032 Classic Transfer Robot
AMAT Applied Materials 0010-08322 Top Local RF Match Rev.003
Ebara ET300WS Vacuum Turbopump 3620-01449 rebuilt
Kawasaki Robot Controller C62C-A002
Equipe PRE-300B-L-2-CCD 300mm Wafer Prealigner ESC-218BT
Ebara A10S Dry Vacuum Pump D175162-004 20,456 hours
ENI OEM-1250 RF Generator 0920-01035 1250W
LAM Research 4420 853-024403-503-E1 Orbital Gas Panel Assembly
