3HXG1117-3 ROTO GLYDE SEALING ABB

KLA-Tencor 348554 Optics Assembly 315º AIT PSF Driver 356662

Asyst 12000-002 Transfer Robot 21 Robot Untested As-Is

Asyst 12000-002 Transfer Robot Axys Model 21 Robot Untested As-Is

Ebara ET300WS-A Turbo Molecular Pump AMAT 3620-01419

Nikon NSR-S306C 4k191-632-1 Transfer Robot

Hitachi CAEG8 Load Port

TEL Tokyo Electron ACT 12 200mm CPL Cool Plate Module CT2985-470922-W​1

Nikon NSR-S306C N17R-381 Robot

Nikon NSR-S306C Robot Controller 4S064-549

TEL Shield Depo D3.0 P34.6 ES3D10-101276-V​1 refurb

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Edwards Dry Vacuum Pump iQDP40 QMB250

HP Hewlett-Packard A4902A Server Rack System A5787-70001

TEL ACT 12 TCP Transition Chill Plate 2985-412581-W1

TEL ACT 12 Precision Chill Plate Process Station CPL 2985-472844-W1


FSI International ChemFill Chemical Delivery Model 1000 1000S-3

GaSonics Loadlock Asher Aura 2000LL 200mm

Nikon NSR Series Robot Interface Unit Z-X4P/12-A0702C

ENI OEM-10B RF Generator OEM-10B-8

Comdel CX-200S CXV-200 V-Quad RF Generator