DS200RTBAG4A GE

Aeroflex Comstron PN9000 Phase Noise Measurement Test System w/Options

AG Associates Heatpulse 2101-01 RTP Annealing System

Novellus Concept-3 Gas Chemical Delivery C3 CVD System

Recif VMT8 200mm 8″ Vertical Wafer Transfer Sorter

Intergen AutoAlign 456(8) 4-6″ Laser Wafer Scribe/Marking

AMAT 0010-06277 LDM Assy Brush Direct Feed Assembly

Espec VAC-100PR Vacuum Oven w/Moisture Removal 1 Torr

Tegam/Lucas Weinschel System IIA RF Power Sensor Calibration System 0.01-18 GHz

Particle Measuring CLS-700 T Chemical Particle Counter

Description

Refurbed ASM 3750973-01 RP Reduced Pressure 9-Rib Hybrid Process Chamber 300mm

Kyosan DFKZ45Z-JA4 RF Generator (ASM Eagle 12)

Tenney T10RC-1.5 Temperature & Humidity Chamber +Opt.

Nikon Optiphot-200 6″ 8″ Wafer Inspection Microscope

Powatec 850 Semi-Automatic 5-8″ Wafer Mounter w/Static Protection WM850 WM-850

HP/Agilent 8563E Microwave Spectrum Analyzer w/006,7,8

Yokogawa/Ando Electric AQ-6312B Optical Spectrum Analyzer 400~1750 nm

KLA Tencor P-2 Automated Long Scan Profiler Profilometer w/Options