Description
Refurbed ASM 3750973-01 RP Reduced Pressure 9-Rib Hybrid Process Chamber 300mm
Kyosan DFKZ45Z-JA4 RF Generator (ASM Eagle 12)
Tenney T10RC-1.5 Temperature & Humidity Chamber +Opt.
Nikon Optiphot-200 6″ 8″ Wafer Inspection Microscope
Powatec 850 Semi-Automatic 5-8″ Wafer Mounter w/Static Protection WM850 WM-850
HP/Agilent 8563E Microwave Spectrum Analyzer w/006,7,8
Yokogawa/Ando Electric AQ-6312B Optical Spectrum Analyzer 400~1750 nm
KLA Tencor P-2 Automated Long Scan Profiler Profilometer w/Options