Description
AMAT 0040-31911 P5000 Etch chamber cathode base
AMAT 0020-07080 Seat, bellows, rotatry head, R6.0, ECP 300mm
AMAT 0020-24313 Clamp plate, Gate valve – Q2
4 Cosel UAW500S-24 Power supply 24V 22A
TEL DSTB000005 Digital I/O PCB assy
AMAT 0010-0 09416 Etch Chamber RF Match, Untested
Sieger Gas detection DIGI-CAT and DIGI-CHEM with sensor
Comdel, CPS-500AS RF Power source, AMAT 0190-13320