The NOVELLUS 02-113640-00 appears to be a system controller or assembly controller used in Novellus equipment, likely for semiconductor manufacturing applications in the 1990s [multiple sources]. Here’s a breakdown of the information I found:
Function (possible uses):
- The NOVELLUS 02-113640-00 likely controlled various functions within a Novellus semiconductor manufacturing tool [multiple sources]. This could include:
- Regulating process parameters (e.g., temperature, pressure, chemical flow)
- Sequencing and controlling automated steps within the manufacturing process
- Monitoring equipment status and data acquisition
- Communication with other equipment in the production line
Features (limited information available):
- Specific details about the functionalities and capabilities are difficult to confirm due to the age of the product [multiple sources].
- It likely possessed processing power, memory capacity, and input/output (I/O) ports to interface with sensors, actuators, and other devices within the Novellus tool [common features for industrial automation controllers].
Applications (possible uses):
- Since Novellus specializes in semiconductor manufacturing equipment, the 02-113640-00 controller was likely used in tools for processes like:
- Thin film deposition (applying thin layers of material onto a substrate)
- Photolithography (patterning circuits on a wafer using light)
- Etching (removing unwanted material to create circuit features)
- Chemical-mechanical polishing (planarizing wafer surfaces)
Finding more information:
While the NOVELLUS 02-113640-00 might be an older product, here are some resources that might be helpful, though success might be limited:
- Used Automation Parts Suppliers: Several companies sell used or refurbished industrial automation equipment, including controllers:
- Pancore Korea: [link novellus 02 113640 00 ON Pancore Korea [invalid URL removed]] (This website lists the part with a price but no datasheet)
- You can search for other suppliers using terms like “NOVELLUS 02-113640-00 controller” or “NOVELLUS system controller supplier”.
- Online communities focused on semiconductor manufacturing or vintage automation:
- Engineers or enthusiasts familiar with Novellus equipment might share information or resources. Search for forums or communities specifically focused on these areas.
Important considerations:
- Semiconductor manufacturing is a complex and rapidly evolving field. Information about older equipment might be scarce.
- If you’re looking for specific details about using the 02-113640-00 in a particular Novellus tool, consulting with an engineer familiar with Novellus controllers and semiconductor manufacturing might be helpful.
- Replacement parts for an older controller might be challenging to find. You might need to rely on specialist suppliers or used equipment markets.
