WICOMAT PCS090 operator panel PG090.203.8
HV# A2SHCPU A1SJ71UC24-R4 A1SX42 A1SY42P
Novellus systems MOD CONT DC/DC converter 03-053424-00
HV# VMT-EL rev.B card
XPU processor board assembly
Omron C200HX-CPU64-E with C200HW-COM06-EV1
Idec FA-2 CPU PF2-CPU1 programmable controller
Moore EAM enhanced analog module P/N 16154-101/01
Yaskawa servopack CACR-02-SU23GC
Epson serial bus board SKP335-1
NEC 19436XA 0B01 V01EA 277-053585-002
Siemens SINEC L2FO OLM/P3 6GK1502-3AA00
Olympus NeoSplan20 IC20 0.46 ∞/0 f=180
Siemens 1605703 K1043 D31 E2 16 05 703 K1043 D31 E2
Uniwire system UV-250 VME interface
HP 94802-61075 Clock GEN 2
IOP-BOARD FC-0065 & MC-120 (4s) mounted
Mitsubishi melsec AOJ2HCPUP21 AOJ2HCPU P21
Motorola MVME 204-2F 64-W5178B01 Rev. A
Zygo 7005 & Retroreflector
PSC imager 8000 07501001-001100-02
