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Applied Energy EPS300 Electrostatic Chuck Power Supply

Thermo Scientific Hakke DL30 Open-Bath Circulator

Yaskawa Servopack CACR-SR05BC1ES-​Y278 Servo Drive

Varian Turbo-V 300HT Vacuum Pump Controller

Fischer Technology Fischerscope EDDY Type: 560C-T3.3 11

ASYST Micro Station Controller MSC6610 Communication

SMC XLA-100DL-X68 High Vacuum Valve

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Mitsubishi PC4701M High Performance Emulation Bench

Leitz Wetzlar Metalloplan Research Microscope Orthoplan

Brookhaven Genus MS14-2 Current Integrator Beam Current

Keithley 2001 Digital Multimeter Autoranging 7 ½


Pfeiffer Vacuum MVP 015-2 PK T05 100 Dry Pump

Brooks Automation Wafer Aligner 017-0024-01

Yaskawa Servopack CACR-SR10BC1ESY​262 Servo Drive

Yaskawa Servopack CACR-SR03BC1KS-​Y264 Servo Drive

Yaskawa Servopack CACR-SR01AC1ERY​102 Servo Drive 200V