Description
AREA FC-7810CD/ 5SLM (5000 SCCM) / GAS : C2F6
ADTECH SL5506SX-2PW-FV4-FV4 REGULATOR /
MFC TYLAN FC-2960 MEP5 / 0.1 SLPM / N2
VICOR VI-MU3-CQ Power Supply, FLAT PAC POWER SUPPLY, NOVELLUS PARTS
STEC PAC-3HS MFC(MASS FLOW CONTROLLER) SYSTEM /Dedicated
VALQUA 027-003179-1, AS568-275, ARMOR CRYSTAL A60
VERIFLO IR400W4032, Regulator / MAX.INLET : 3000 PSI
UNIT UFC-1260A / 500 SCCM / NH3
CHEMRAZD5641-1320-SC657 , FORMED O-RING