3BHE024855R0101 UFC921A101 ABB

2 Astro Tool 70-41AP6, Pneumatic basic frame

Ney 72-s2g Sweepsonic 2 Ultrasonic generator 208 V

Aera MFC, TC FC-D980C SiH4 Gas, 750 SCCM, S25004, NOVELLUS 22-189470-00

ESD Semtronics Sensors

UNIT Series 8560 MultiFlo 500 PSI MAX/ 3500 kPa

Parker OEM650 stepper motor driver

2 , Parker 945Y2NC/NCFSFFF?B VERIFLO, High purity dual valve 22-026085-00

Description

MKS 153D Throttle valve 153D-15973, type 153 control valve

5 22-173564-00 O-ring, material white perlast, compound G71H

Mattson 15 x 15 Quartz Insulator,

Genus 3779-01 Solenoid valves with driver board assy, 8 valves

NOVELLUS foreline 010-128858-00 with MDC valve and GP 275 mini convectron gauge

ZYMARK MODULE EIA 112200

AMAT 0150-21362 Pump frame interconnect EMC compliant

SCV KIT2 SCT TD4SC-GC-1671FA Valve, SST, 06-16216-00