3HXD0100-89 SMB ABB

AMAT 3700-03023 cover(gas top) O-Ring 1

ISSOKU 240228-27 DNS 2-39-61774, BALL SCREW

AMAT 670268 PLUMBING, H2 PRESS. SW

AMAT 0140-00575 HARN. ASSY., RETURN TANK SENSORS

TERADYNE 3870-01894 219589 NI COATED SLIT VALVE DOOR WITH VITON SEAL

AMAT 3510-01006 ORF RESTR FLOW 15L/MIN IN SWLOK SS-400

ESI 150390 BULLED WAFER ID

Description

EBARA C-4006-021-0001 EBARA pump cooler1&2

EBARA C-4006-022-0001 EBARA pump cooler 3

Ebara C-3133-008-0001 Chuck Piece(Wet)(EPO2?22 T/O)

AXCELIS H3501182 Lens, Sapphire Plano, Conves 50mm F

TEL 2986-419213-15 MOTOR,DC 8 DEV L#03(LD ARM1,L)

TEL BB87-011168-14 HP SHOWER HEAD ASSY

AXCELIS 1180520 200MM HOLDER CHUCK (11S5389)

AMAT 0010-02579 HOSE ASSY, CHAMBER #2 SUPPLY

AMAT 26-81534-00 BEARING SUPPORT

AMAT 0040-09621 HOUSING TEMPERATURE CONTROLLER