B/E Aerospace 1231-CCN-GL-001 Temperature Control Unit Tested
Yaskawa Dual Arm Transfer Robot XU-RCM7221
Alcatel Adixen Vacuum Turbopump ATH 1600M 3620-00426 P65621B4
Daikin TWR200A4 Multi Loop Heat Exchanger Chiller
MKS FI80131 Remote Plasma Source AMAT 0920-00131W 3576 Hours Tested
MKS Instruments AX7685-20 Remote Plasma Source ASTRONex AMAT 0190-34542 Rev. A
MKS Instruments AX7685-20 Remote Plasma Source ASTRONex AMAT 0190-34542 Rev. B
Kawasaki 3NS511C-F103 CMP Wet Robot As-Is
DNS Electronics FC-3000 Heater Controller As-Is
Nikon MAC & LS Controller 027H0153 W/ Sub EP & LS IOP
SMC Thermo-Con INR-244-244T-670 ACT 12
Tokyo Electron ACT 12 Front Opening Unified Pod B-Type
TEL Tokyo Electron ACT 8 AC Power Box PB1-U125-01-T with Control Board
Osaka Vacuum TG1003BW Turbopump 3620-01325
Mitsubishi Escape Twin Gas Abatement Module Scrubber as is
AE Advanced Energy 3153137-932 Remote Plasma Source Rev.G Litmas RPS As-Is
