Description
ATS M-PAK Temperature Control System MP20Y-GL
AMAT XR80 150mm Implanter Sub Fab Rack
TEL ACT 12 Adhesion Main Body Frame 300mm
AMAT XR80 Implanter Wheel Assembly 200mm
TEL Tokyo Electron Chilling Hot Plate Process Station (CHP) ACT 12 Clean Track
GaSonics Aura A-2000LL Loadlock Asher Configuration 99-0311
GaSonics Aura A-2000LL Loadlock Asher Configuration 99-0339