Asyst 12919-002 RMT Power Box Assembly Rev.B AXYS SP1 0016781-000
KLA Tencor SP1 Channel Polarizer 0024476-000
Novellus RF Match 02-266279-00 Rev. C
Yaskawa Linear Motor Controller CLSR-33-N2CD-1 Nikon NSR-S204B
Yaskawa XU-DV0804V Linear Motor Controller Nikon NSR S204B
Daihen RGA-50C-V RF Power Generator 5000W Tested
Daihen AGA-50B2-V RF Power Generator DGP-120A2-V DC Power Supply Tested
Daihen WGA-50E-V RF Power Generator 5000W Tested
Panasonic ULVAC CLBA02 Ball Attach Tool Vane Vacuum Pump DSB-600
Alphasem SWISSLINE 9021 SL9021 Die Attacher
ENI OEM-2000 RF Generator Rev. E 2000W 13.56 MHz tested
KLA-Tencor AIT 2 Optics Module 0099610-000 untested
Alcatel ATH 1600 M Turbopump not as-is
Yaskawa XU-ACP4861 Prealigner 0190-19918
Alcatel ATH 1600 M Turbopump
Kawasaki 320032-B010 Robot Track 0190-17940
