Kawasaki 320032-B010 Robot Track 0190-17940
Asyst 12919-002 RMT Power Box Assembly Rev.B AXYS SP1 0016781-000
KLA Tencor SP1 Channel Polarizer 0024476-000
Novellus RF Match 02-266279-00 Rev. C
Yaskawa CLSR-1B-N2CD Linear Motor Controller 4S064-209
Lam Research 2080 TCU Temperature Control Unit 852-11098-020-B-6882
AMAT Applied Materials 0010-12802 300mm Titan-I Head Edge Fast Tungsten Process
Alcatel ATH 1600MT Vacuum Turbopump P65621B2 needs rebuild 3620-00192
Alcatel ATH 1600 M Vacuum Turbopump P65621A0 needs rebuild 796-900675-102
ENI Optima DCG-200 DC Power Supply Slave
Comet 20063155 RF Match 0190-41309 3000W 13.56MHz
Alphasem SWISSLINE 9021 SL9021 Die Attacher
ENI OEM-2000 RF Generator Rev. E 2000W 13.56 MHz tested
KLA-Tencor AIT 2 Optics Module 0099610-000 untested
Alcatel ATH 1600 M Turbopump not as-is
Yaskawa XU-ACP4861 Prealigner 0190-19918
Alcatel ATH 1600 M Turbopump
