3HXG1111-5 Hose ABB

TEL ACT 12 300mm CT2985-428404-W​3 Bath Assy CT2985-404035-W​4 Changer Assy AS-IS

TEL ACT 12 300mm CT2985-404065-W​4 Bath Assy CT2985-404036-W​4 Changer Assy (Left)

Mecs Prealigner OFH3000-001 I-900SRT 0FH3000-001

LAM Research 4420 852-011201-581-​E1-230 Exit Loadlock Bottom View Assembly as-is

LAM Research 4420 852-0112200-500​-E1-230D 853-012123-500-​E1-230 Harmonic Arm

LAM Research 4420 852-0112200-003​-E 853-012123-001-​G-230S Harmonic Arm Drive

LAM Research 4420 852-011201-001-​D 853-017637-002 Harmonic Arm Drive Assembly

AE Sekidenko OR4000T Optical Fiber Thermometer 955-3001-02 0190-33422