Novellus facility chemical interface 02-300915-00
KLA 710-404420-00
Sew eurodrive MDX61B0011-5A3-4-0T
Bently Nevada 3300/20-11-01-02-00-02 dual thrust monitor
Dover instrument SMA6520-50HS-001K & GA6520-11
Siemens KSP-COM351 KSP-COM352A L&A EA 00372446-01
Siemens A362-BB-S50-3xAC 6AR1312-0AA15-0AA0
Siemens CPU928B 6ES5928-3UB21
Monovolt SPT module 4 160 231 PU 03
IAI CON-PT-M & RGW-CC & REXT-CTL
Futec FC7037 card
Nikon NVCEX-X4B1
Fuji FRENIC-Multi FRN5.5E1S-2CP1
Balzers QM 420B Art-No.: 894 BG 438 100 AT
Fuji FRENIC-Multi FRN5.5E1S-2CP2
(TD1) Mitsubishi AC servo motor HC-SFS153K 1.5kW
(TD2) Mitsubishi AC servo motor HC-SFS153K 1.5kW
Mitsubishi AC servo motor HC-SFS153K 1.5kW
Fuji FRENIC-Multi FRN5.5E1S-2CP3
KLA Tencor PZT controller 710-404582-00
Siemens 6ES5921-3WB14 & 6FR9320-8CE & 6FX1817-0AX16
