Tylan 2900 series MFC, FC-2900FV, He, 500 SCCM, S2017
SMC NCDQB125-U1A97 Pneumatic Cylinder AMAT 0010-03051
2 Malema M-10000-T2021-0?0, 954258 Flowmeters, 0.3-3.0 L/m, 0-10 VDC output
6 AMAT 0020-18513, Diffuser, Clean port, HDPCVD ULTIMA
AMAT 0150-21933 cable assy 50FT water leak detect mainframe interconnect
AMAT 0150-21117 Cable assembly EMO INTC Main AC to pump frame
port Electronics F-CPL-L12355P Benchtop coupler, 1310 nm and 1550 nm
AMAT 0020-21275, Chamber Clamp Ring
PRI BM26012 AB26012 and BM26011/K, Assy, V-STN XORB-100
116335 381163500
RENISHAW X-Y Stage, XY Stage S83867
Tuthill P10780, Fluid Pump
Inficon Capacitance Diaphragm Gauge CDG100A , 1333.22Pa
Aera FC-7800CD 24Y0494 500 SSCM He Pressure Controller
Aera FC-7800CD MFC 500 SSCM He Pressure Controller
Power Triade ARX-X589, HP08186824
Unit 1660 MFC, UFC-1660 O2, 10 SCCM
Tylan 2900 series MFC, FC-2900V, He, 100 SCCM, S0008
