DI880 3BSE028586R1 ABB

 

MKS heated valve 100932500 HPS division, looks clean

MKS baratron 227AA, 1 TORR, +/- 15 VDC, as is

MKS baratron 141AA, 10 Torr, as is

Stec PV-2000 PIEZO VALVE PV-2103MC

National instruments 6052E Multifunction 16 channel 16 bit I/O PCI card 185489D

Industrial Control Equipment / Berkeley Process, MIO-ODC-32-200 POS 32 Point

Robitech 980-4825 8 Solenoid module PCB assy

Keithly CTM-05 counter timer card PC6122, 14014

Novellus A01-201-01 Housing shower head, 8 inch

 

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ULVAC Sinku Kiko Diaphragm vacuum pump DA-30D TWO stages 50 Torr, 50.60 Hz

Schlumberger A3126022000 NGH Theta axis motor assy 3126-022-000

Tylan general CMH4-M11S06 gauge, 0-100 M torr, S7628


Tylan General Adaptorr Model AC-2 vacuum general, Throttle valve controller

AMAT 0021-71301 interface side plate

Parker Veriflo valve 930Y2NC/NCFSFFF?B, 45700153 P/N, 125 PSI max

Mykrolis MFC IntelliFlow DEVICE NET, N2, 10000 SCCM,

MKS baratron 141AA, 10 torr, +24 VDC, as is