Description
Lindberg STF55666C Three-Zone Tube Furnace 6″ Dia x 36″ L (1100°C)
Nippon Pillar PE-40HA High Temperature Bellows Pump
MKS ENI OEM-28B-04 RF Plasma Generator 2.75kW 13.56MHz
HP/Agilent E4422B/1EM ESG-A RF Signal Generator 250 kHz – 4 GHz
ASTeX 5kW 2.0 MHz Variable Source RF Generator MKS
Asyst PN: 9700-6209-01 Power Distribution Unit Kit, ASM PN: 91-125327A03
Asyst PN: 9700-6209-01 Power Distribution Unit Kit, ASM PN: 91-125327A04