Description
Stec MFC SEC-4400MC, Ar 500 SCCM, with .
AMAT 0020-22153 Counter balance, magnet source
PureDigital Mass Flow Controller 6256, WF6, lots of 2
UltraGlo vacuum general UV2-11 & UC2-31S01, N2
Unit Instruments URS-100-5, 5 chnnel MFC controller
Pfeiffer TCP 015 Vacuum Turbopump Controller PM C01 598, looks and clean
Millipore MFC, FC-2900V, BA3375KEH000, 500 SCCM, NF3 gas
Millipore MFC, FC-2900V, BA33753BE000, 100 SCCM, CF4 gas
Novellus 02-140949-00 REV C Main system start stop module
MKS baratron 626A-23861, 0.1 Torr Range, S6113
Chemraz greene tweed 9383-SC513 Oring 2-383 compound 513, 78-2766