INNPM22 ABB

Aera FC-982C MFC, TC FC-982C, NH3 gas, 20 SLM range, S003 with

Mykrolis FC-2902MEP-T-4V?, SiH4 gas, 1.5 SLPM, novellus 22-161384-00

Mykrolis FC-2902MEP-T, SiH4 gas, 500 SCCM, novellus 22-157425-00

Mykrolis FC-2902MEP-T, NH3 gas, 20 SLPM, S3004 Novellus 22-159378-00

Kalrez 17471 oring compond 4079, 22-154780-01, 18.931 x 0.210 inch

2 Chuck Assembly 6″ 01-20-04076-06

2 Chuck Assembly 6″ 01-20-04705-06

Description

Aera FC-980C MFC, 1.5 SLM, N2O gas, novellus 22-278256-00

AE Aera, TC FC-D986CY-BF, MFC, 5 SLM, NF3, Novellus 22-140276-00

AMAT 0020-23277 Lower shields, SST, 8 inch, cleaned, sealed

Stec SEC-V100 MFC, SEC-V110DM, N2 gas, 10 SLM range, novellus 22-178895-00

2 AMAT 0660-01809 Square D VME 30299-083 Seriplex bus VME 6U1V2

LAM ceramic ring 716-011830-006

ICS ADVENT OEMC-06-06 module controller