HP/Agilent 8563E Microwave Spectrum Analyzer w/006,7,8
Yokogawa/Ando Electric AQ-6312B Optical Spectrum Analyzer 400~1750 nm
KLA Tencor P-2 Automated Long Scan Profiler Profilometer w/Options
Aeroflex Comstron PN9000 Phase Noise Measurement Test System w/Options
AG Associates Heatpulse 2101-01 RTP Annealing System
Novellus Concept-3 Gas Chemical Delivery C3 CVD System
Recif VMT8 200mm 8″ Vertical Wafer Transfer Sorter
Intergen AutoAlign 456(8) 4-6″ Laser Wafer Scribe/Marking
AMAT 0010-06277 LDM Assy Brush Direct Feed Assembly
Brooks Automation MagnaTran 7 SCARA Robot Arm (Refurbed) ASM
PLASMOS SD-2000-LC Automatic Ellipsometer (Metrology)
Rudolph FE-III (FEIII) Focus Ellipsometer (Metrology)
Refurbed ASM 3750973-01 RP Reduced Pressure 9-Rib Hybrid
Kyosan DFKZ45Z-JA4 RF Generator (ASM Eagle 12)
Tenney T10RC-1.5 Temperature & Humidity Chamber +Opt.
Nikon Optiphot-200 6″ 8″ Wafer Inspection Microscope
Powatec 850 Semi-Automatic 5-8″ Wafer Mounter w/Static Protection WM850 WM-850
