MCOB-01 3HNE00010-1 ABB

4 UNIT MFC, UFC-1200A N2 200 SCCM and 50 SCCM, UFC-1200A Ar 100 SCCM and 1 SLM

AMAT 0040-22024 Endura PVD, standard chamber, 0200-24746 Shield, Target liner

MKS HPS 104211004, HPS 421Cold Cathode Sensor KF25,

6 Novellus 0850-103478 brackets, rev A

Square D Circuit breaker Panelboard NQOM354L600T

Vacuum General, ADAPTORR MODEL AC-2, Millipore AC213C REV C pressure controller

VAT PM-4 Adaptive Pressure Controller, 641 PM-26PM-0002

Description

TYLAN GENERAL, ADAPTORR MODEL AC-4, Millipore AC-4

Aera TC FC-PA7800 MFC 100 sccm NH3, Novellus 22-363308-00

Aera TC FC-PA7800C MFC 200 sccm He, Novellus 22-290302-00

Aera TC FC-PA7800C MFC 200 sccm He, Novellus 22-268760-00

Aera TC FC-PA7800C MFC 1 SLM AR, Novellus 22-268637-00

Aera FC-7810CD MFC 10 SLM O2, Novellus 22-176685-00

Aera TC FC-PA7800C MFC 200 sccm H2 Novellus 22-268761-00

Aera TC FC-PA7810C MFC 50 SLM O2, Novellus 22-190944-00