P0170SR FOXBORO

 

Applied Materials Pneumatic Valve Assembly 9010-00069 W

Brooks Automation Genus 200mm 001-9010-13 Left Load Loc

LAM Research 4420 Upper Seal Plate Assembly 853-020936-

VAT 16546-PA21-AAE1 Pendulum Valve AMAT 3870-00150

Liebert UPStation GXT Interruptible Power System GXT2-2

Verteq SRD Control Module 1600-55A Working 120V

Verteq SRD Control Module SC1600-5 Working 120V

Luxtron 100C Optical Fiber Temperature Control System 0

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Description

 

Force Computers SASI Board 810-017035-001 Rev. B Worki

Force Computers Control Board 810-017038-002 Working 88

LAM Research 4420 Inner Gate Assembly 853-012261-001-?4-

LAM Research 4420 ADIO PCB Board 810-017031-R4 Rev. 1 W


LAM Research 4420 852-017500-001 CRT-Keypanel Chassis A

LAM Research 4420 852-017500-003-?6-C220 CRT-Keypanel Ch

PRI Wafer Transfer Station IFE-3301 Asyst Loadport SMIF

Shimadzu TMP EI-281 Turbo controller working