CT AURAVISION 94V-0 E92481
Tylan General CMLA-21 100 TORR CAPACITANCE GAUGE
TWO TRANSICOIL 252C-P115 0-15 PSI 12-38 VDC, looks
AMAT 0190-18061, RF Cable, 2.5W source, HDP, CVD Low K
LINTEC Liquid flow controller, TEOS, 0.1g/min
MKS baratron 127AA-00001E, 1 torr, S78759-1V
Stec MFC SEC-4400, SEC-4400MC, N2, 500 SCCM, S0482
MTH Pumps 118-10-0030-0 Canned Motor Pump
Aera MFC FC-7700C, AR, 100 SCCM comes with Aera adapter
MKS BARATRON 122AA-00010BB, 10 TORR,
2 Novellus Speedfam IPEC 810-738370 Vexta PK564ANA-TG30, Stepper Motors
4 Misubishi F-20CM-5U Positioning Counter programmable controller modules
BODINE ELECTRIC 42A3FEPM-E4 GEARMOTOR, 130 VOLTS, CLEAN
MILLIPORE FC-2902MEP-T, SIH4, 1.5 SLMP
3 Mass Flow Meter Tylan FM-360, Argon and Air, untested
STEC PV-2000 MFC Piezo valve PV-2103MC in box
STEC MFC SEC-4550M, N2, 40 SLM
5 AMAT 0021-09098 Ring separation, MXP + Liner, looks
