Nova NovaScan 420 210-48000-01
Hitachi Clean Robot CR-712V 00XCA3701A working
TDK Load Port TAS300 0190-17837 001 TAS-MAIN working
Yaskawa Nikon RX Amplifier 4T070-145 SPA371C NSR-S307E
Yaskawa Nikon RY RD Amplifier SPA474L 4S066-593-4 NSR-
Yaskawa Nikon CMTY-L Amplifier 4S066-014-3 SPA476E NSR-
Yaskawa Nikon RY-LU Amplifier SPA474I 4S066-590-2 NSR-S
Yaskawa Nikon CMTY-R Amplifier 4S066-015-3 SPA476F NSR-
AMAT Endura Controller 0010-31159 PVD Chamber 300MM
Berkley BX2 Controller 8 Axis 6 drives 100-000-928 AMA
Berkley Pre Aligner 300 mm 100-000-871-02 AMAT Quantum
AMAT Ring Edge TXZ 300M 0021-11110 surplus
AMAT Susceptor 0200-01947 surplus
AMAT Cover Ring 300MM POP 0021-16783 surplus
Edwards Pump QDP 80 QDP80 untested
Nikon NSR Wafer Loader Slide 48191-302AN Z-X3-B3207R w
