AMAT 0020-30287, CVD Chamber pumping plate adapter, 200 mm
AMAT 0200-10176, Shadow ring, Quartz, 200mm Etch chamber, MXP+
LINTEC mass flow controller LM-1100M-8, TEOS 0.1 g/min
AMAT 0140-02118 Harness assy, DPS Metal
IPEC Speedfam Novellus 0760-727388 Pneumatic end effector housing SMC switch
AMAT 0140-02118 Harness assy, DPS Metal, 300MM J5 Conn
3 Berkeley Process control ASM81-A-0/B-00-?NB/10, AC servomotors, 5000 RPM
AMAT 0020-18385 Block, Daul Gas Feed HDPCVD Ultima,
Novellus 60-032895-00, Isolation valve MDC 313004-1000
AMAT 0100-20003 Digital I/O BOARD, REV G
SMC INR-244-217A, Thermo-con controller
2 AMAT 0020-28225 shuttle shaft rotation assemblies
Chemraz 9363-SC520, 2-363, Compound 520 Oring Seal 78-2738
Varian 70854001 END station vacuum controller
Chemraz 9278-SC513, 2-278, Compound 513, 11.984 x 0.139 inch 22-136504-00
Kalrez 5-378 10.475 x 0.210 inch, 78-0161 Oring seal
AMAT 0020-09179, Insulation pipe, Quartz
2 AMAT 0020-24532, Cleaned Lower Shields
